Tongji University's nano metrology tech claims top national sci-tech award, national platform lands in Songjiang

A research project led by Tongji University won the First Class Award of the National Science and Technology Progress Award for 2025. After more than two decades of research, the breakthrough has developed core technologies for quantum optical lattice-based nanometrology in integrated circuit manufacturing, bridging fundamental theories, metrology standards, and industrial applications.

Quantum optical lattice technology creates a nanoscale inscription by depositing atoms in ordered patterns under laser cooling and optical field effects. [Photo/WeChat ID: sh_songjiang]

Jointly developed by five institutions, the achievement led to the creation of the National Industrial Metrology and Testing Center for IC Micro-Nano Inspection Equipment, a flagship project of Tongji's Yangtze River Delta G60 Science and Innovation Corridor Research Institute, which is based in Songjiang. The facility leverages Songjiang University Town's innovation hub to accelerate lab-to-industry tech transfer.

Precision devices used to fabricate nanoscale rulers based on quantized optical lattice constants at Tongji University. [Photo/WeChat ID: sh_songjiang]

The team creates atomic-scale nano rulers through laser cooling and deposition of chromium atoms, yielding five primary national reference materials with picometer-level stability, along with China's first national secondary angular nano reference material. Wafer-standard calibration chips, certified as secondary national reference materials, have been widely adopted by domestic IC manufacturers and were listed by Ministry of Industry and Information Technology of the People's Republic of China in 2025 as advanced applicable technology.

The team successfully developed wafer-standard calibration chips and received approval for multiple national secondary reference materials. [Photo/WeChat ID: sh_songjiang]

Housed at CSG Intelligent Industrial Park, the national center builds an innovation ecosystem that links universities, enterprises, and industrial chains. It serves the Yangtze River Delta by providing R&D, pilot testing, and calibration services to domestic IC and precision instrument firms, fueling the integrated development of science and manufacturing.